Hiden has introduced new beam optic and ion source configurations to its IG20 high-brightness gas ion gun.
The company claims that the updates will enable both increased beam brightness and beam contrast, together with a significant reduction in ultimate spot size.
With a raster scanning area of 4x4mm the IG20 is designed to be equally suited to depth profiling and to surface imaging applications.
Parameter selection and gun operation are fully under PC control, and the gun is operable with both oxygen and with inert gas primary sources.
Product features
- Two interchangeable ion sources are available for operation with the same beam optic configuration.
- One is optimised for general analysis with maximum brightness and a beam current of 800nA, one is optimised for high dynamic range depth profiling applications with minimised beam scatter and supporting a beam current of 200nA within a beam diameter of just 80 micron.
- The IG20 ion gun is differentially pumped and includes full raster scanning, incorporation of a neutrals dump, DN-35-CF(2.75 inch diameter) conflat-type mounting flange and simple replacement of the ion source yttria-coated iridium twin-filament.
- Companion products include the IG-5C metal ion gun with caesium source and a choice of quadrupole SIMS detectors.