Hitachi High-Technologies has released the innovative SU8200 series of cold field emitter SEMs worldwide.
Employing a new type of cold field emission (CFE) gun, the SU8200 combines the inherent high resolution and brightness of conventional CFE with previously unseen beam stability and probe currents.
Latest trends in advanced materials research mean increasing requirements to image and analyse light-element and beam-sensitive materials such as those used in lithium-ion batteries, fuel cells, catalysts or novel electronic devices.
At the heart of the SU8200 series is the CFE source. The CFE gun employs a new vacuum system and a Hitachi patented technique to reduce gas molecule deposition on the emitter tip.
The emitter operates in a ’clean’ state, and emission current and beam stability are significantly improved.
The result is a SEM electron source offering high S/N ratio, high stability and resolution performance at all accelerating voltages. The enhanced stability and probe current provides opportunities for enhanced low voltage elemental microanalysis.
The SU8200 series can support a variety of large-diameter silicon drift detectors (SDDs) for high spatial resolution, high sensitivity, and high speed X-ray detection.
The dual-in-lens detector system is claimed to provide the most sensitive and flexible electron detection system available.
Fine contrast differentiation is achieved by selectively filtering inelastic scattered electrons and directly detecting specific energy back scattered electrons. Selective filtering is particularly powerful for enhancing material contrast at low acceleration voltages.
The SU8200 series includes three models (SU8220, SU8230, and SU8240) offering various stage, chamber and detector configurations for a wide range of imaging and analytical applications.