The SU8040 Field Emission Scanning Electron Microscope (FE-SEM) from Hitachi features a Regulus (Regulated Ultra Stable) Specimen Stage for smooth sample control at ultra-high magnification.
The SU8040 is suited for nanotechnology industries such as the semiconductor sector and for advanced nanotechnology material analysis.
The Regulus stage provides the extremely fine specimen stage control that is needed for smooth operation at high magnifications in order to be able to locate and maintain the regions of interest.
It uses a proven conventional motor drive with a newly developed motor drive train to give seamless stage operation throughout the magnification range.
Also new for the SU8040 is the optional 'cell count assist' software, which recognises the repeat patterns of DRAM/SRAM samples and makes use of the Regulus stage performance to allow automated identification of patterns for measurement and defect analysis.
The automated approach eliminates manual searching for the regions of interest.
The SU8040 offers strong imaging capabilities, with a resolution capability of 1.3nm at a landing voltage of 1.0kV.
The SU8040 benefits from Hitachi's in-lens triple detection system, originally introduced on the SU8000.
This novel, ultra-sensitive detection system allows high-efficiency simultaneous multi-signal imaging and energy filtering.
The detection system provides high-sensitivity detection for ultra-low current imaging of sensitive materials and is said to allow the imaging of never-before-seen structures and surface properties.
Secondary electrons and low- and high-angle backscattered electrons can be detected and displayed independently or as a mixed-signal image using a primary beam of as little as 100V, providing the capability to observe the absolute surface structure, as well as properties such as surface potential contrast.
