Hitachi High-Technologies has introduced a scanning electron microscope (SEM) for applications such as semiconductor devices, electronics, nanotechnology materials, life sciences and medicine.
The SU9000 field emission (FE) SEM features novel electron optics that enable a 0.4nm resolution to be achieved at an accelerating voltage of 30kV, with a usable magnification up to three million times.
Featuring a new type of cold FE electron source with good stability and brightness and utilising Hitachi's in-lens detection technology, the SU9000 also provides ultra-low current and the low-voltage imaging of sensitive materials.
The SU9000 also offers fast specimen exchange times and features optional scanning transmission (STEM) modes.
The cold FE electron source delivers probe current that is approximately double that of earlier models, giving high-quality images with excellent S/N and stability from the moment the electron beam is switched on.
The high-performance electron optics allow a resolution of 1.2nm at an accelerating voltage of 1kV to be achieved without the need for beam deceleration technology.
This simplifies low-energy imaging and increases sample throughput.
Hitachi's dual through-the-lens detection system enables the filtering of electrons of different energies in order to give the capability for simultaneous multi-signal imaging.
This provides good versatility for the imaging of structures and surface properties.
Using the STEM option, the SU9000 ensures STEM resolution that can allow the lattice structure of graphite (C [002] d=0.34 nm) to be imaged at a 30kV accelerating voltage.
The STEM detection system enables simultaneous bright-field and dark-field imaging and annular DF detection with a selectable scattering angle.
Up to four signals can be simultaneously displayed.
The SU9000 features side-entry sample insertion and can be ready for high-resolution imaging in as little as six minutes, the fast exchange times benefiting from the high stability of the electron beam.
A vacuum around the sample minimises contamination, enhancing resolution and eliminating the need for an additional cold trap for cryo work on biological samples.
Ease of use is said to be ensured through a new user interface, while a large 24.1in widescreen monitor offers a comfortable environment for both operating the instrument and viewing images.
