The differentially pumped PSM probes are designed to provide measurements within the reaction chemistry of plasma processes.
The system offers an integrated quadruple mass spectrometer (QMS) and a Bessel-box energy analyser to help generate diagnostics that identify positive plasma ion species and intensities.
The Hiden platform is also capable of identifying ion energies within a /- 100eV energy window.
Additionally, the system is operational as a conventional QMS for use within the measurement of gas species and leak detection.
The differential pumping feature and axial symmetry design enables operation within process pressures from 10E-4mbar to 2mbar.
Features overview:
- Programmable signal gating with time delay.
- Mass range options in excess of 1000amu.
- Adjustable gate delay.
