The Hiden EQS-series of quadrupole mass spectrometer probes has been enhanced with the addition of an electron bombardment application.
Originally introduced for measurement of external ions in a vacuum environment, the EQS-series were designed specifically for application to the SIMS surface analysis technique.
The addition of the high-efficiency electron bombardment ion source - mounted at the immediate entry region to the probe for direct measurement of secondary neutrals (SNMS) - enables quantification of concentration over the full abundance range from trace level to 100%.
The dual techniques are beneficial for diverse surface analyses including measurement of optical and metallurgical coatings, alloys, corrosion layers and architectural coatings.
Both SIMS and SNMS can be used throughout a continuous measurement sequence to provide quantified depth profiling data through the widest concentration range.
The probes combine both mass and energy filters for optimum beam transmission efficiency together with refined mass resolution and abundance sensitivity, with mass range options selectable up to 2500amu.
They are available with both gas and metal-sourced ion guns to enable SIMS/SNMS upgrade of existing surface analysis facilities and alternatively as complete standalone SIMS/SNMS workstations.
