BOC Edwards is launching its range of robust, compact, high performance IPX vacuum pumps - intially developed for semiconductor manufacturing - to the industrial and scientific markets
Developed for the demanding semiconductor manufacturing industry, IPX is a single-pump system offering reliable, fast pump down from atmosphere to high vacuum.
The unique compound mechanism combines molecular drag technology with a regenerative high pressure mechanism on a single high speed shaft.
Pump down from atmospheric pressure to high vacuum can be achieved very quickly, and the pump is ideal for fast atmospheric cycling applications. The robust vacuum pumping capabilities of the IPX series are suitable for a wide range of research and fabrication laboratory applications, including high-energy physics, clean room systems, microscopy and laser cavities.
IPX pumps can also be used as a replacement for conventional fore-vacuum and turbomolecular pump combinations.
High reliability, low power, and no nitrogen purge requirement makes it a cost-effective option.
IPX pumps have a five year service interval and are available in 100, 180, 500m3/h versions with ultimate pressures of <5e-3, <1 e-4 and <1e-6 mbar respectively.
