Allows imaging to take place as a result of a process involving the secondary electrons generated in the VPSEM, which are impossible to collect under normal operating conditions
The Environmental Secondary Electron Detector (ESED) from Hitachi High-Technologies has significantly expanded the range of applications for Hitachi's variable pressure scanning electron microscopes (VPSEMs).
Use of the detector for the microscopy of electronic materials and devices and in materials science and life science is highlighted in two new technical data sheets from Hitachi.
TDS 92 covers electronic applications, while TDS 93 looks at materials and life sciences applications.
ESED allows imaging to take place as a result of a process involving the secondary electrons generated in the VPSEM, which are impossible to collect under normal VPSEM operating conditions. Images produced by ESED show surface detail and virtually eliminate the effects of specimen charging.
This offers a powerful alternative to the traditionally used backscattered electron detector.
Applications covered in TDS 92 include surface investigations of the pole plate of an electrolytic capacitor, wire bonding joints of LSI devices, through holes in PCBs and cross-sectional structures of Ball Grid Array solder joints.
TDS 93 reports on applications involving rubber rollers, investigations of calcium carbonate and imaging of mouse kidney and helicobacter bacteria.