Semiprobe today released a vacuum probing module as a research accessory for the modular Probe System for Life (PS4L) platform.
The vacuum-probing module allows users to test devices at wafer level in a vacuum.
Because many devices, such as MEMS gyros, are later packaged in a hermetically sealed vacuum package, this system allows testing in conditions simulating the final package.
The testing of these devices in free air causes air resistance that alters the motion of the device structure.
Previously, testing these devices required expensive vacuum probing systems or the placement of the device in a vacuum package.
Semiprobe provides manual and semiautomatic probe systems for MEMS test applications primarily focused on electrical and non-electrical characterisation of devices using unique simulation and measurement capabilities.
The flexibility of the PS4L platform allows users to modify their system as their test structures and test procedures change.
