Hiden HPR-60 molecular beam mass spectrometer (MBMS) quantitatively analyses gas species sampled from plasma and combustion/flame chemistry, catalytic reactions, or CVD
The Hiden HPR-60 molecular beam mass spectrometer(MBMS) is specifically designed for the investigative researcher for quantitative analysis of reactive and neutral gaseous species sampled direct from processes as diverse as plasma and combustion/flame chemistry, catalytic reactions, chemical vapour deposition, semiconductor gas abatement and environmental chemistry.
The compact, low-footprint system is supplied in both two and three stage differentially pumped versions to optimise performance through a broad pressure range for applications operating up to atmospheric pressure.
The close-coupled multistage pumping and precision-aligned skimmer cones rapidly reduce pressure to the UHV regime, forming a well-defined molecular beam and minimising intermolecular collisions of both reactive and condensable species for optimum analysis integrity.
Detection of true process neutral species are significantly enhanced through inclusion of an elegant dynamic beam chopper system which, coupled with fast acquisition gating of the modulated foreground and background acquired data, is used to suppress residual contributions by a factor of 100.
Investigation of process neutrals is further enhanced by inclusion of the soft ionisation mode to control molecular fragmentation in the ionisation process, and the technique is further extended in negative ion mode to selective measurement of electro-negative species by the low energy electron attachment process.
