Sims (secondary ion mass spectrometry) is a high sensitivity technique for the determination of surface composition, contaminant analysis, and depth profiling in the surface layers of a sample
Hiden Analytical announce the introduction of a complete, compact Sims facility conveniently mounted on a single UHV Conflat-type flange.
The new system, aptly named Sims-on-a-flange, allows users to quickly install a complete Sims resource on existing vacuum and process chambers with no major reconstruction or alignment issues.
Applied to analyses extending from a few Angstroms up to a micron in depth, surfaces are analysed by species and by abundance, layer by atomic layer.
The system comprises the analytical-grade quadrupole mass spectrometer with integral energy filter, the fine-focus oxygen gas-sourced ion gun, and all necessary software and hardware for system operation, for ion beam raster scanning, for data presentation and for surface mapping.
Mass range options enable operation from 1amu to 1000amu, with ion counting detection of both positively and negatively charged ions.
Standard mounting flanges are DN-150-CF (six-inch port size) and DN-200-CF (eight-inch port size) dependent on options.
