The JEM-2800 from Jeol is a 200kV transmission electron microscope that delivers high-throughput nano-analysis for process and quality control of mass-produced semiconductor and materials samples.
The multi-function TEM features high-resolution imaging in TEM, STEM, and SE modes; ultrasensitive elemental mapping with a large-angle energy dispersive spectrometer (EDS); electron energy loss spectroscopy (EELS) for chemical analysis; critical dimension analysis; tomography; and in situ observation of samples.
The TEM functions without use of the traditional fluorescent screen on the electron column.
The JEM-2800 is said to speed specimen observation through fully automatic functions including adjustment of focus, astigmatism, contrast, brightness, crystal zone axis alignment, and height.
Switching between analysis modes is seamless, according to Jeol, and quick data collection shortens turnaround time between samples.
The JEM-2800 TEM features an operator navigation system and on-screen operating guide.
Additional features and key specifications of the JEM-2800 include a Schottky field-emission electron gun, highly stable eucentric side-entry goniometer stage, a magnification range of 100X to 150,000,000X using STEM, 0.1nm TEM resolution and 0.20nm BF/DF STEM resolution.
