The Uvisel spectroscopic phase modulated ellipsometer allows the rapid characterisation of thickness and refractive index of single and multiple layer thin film structure
The Uvisel is ideally suited to semiconductor, polymer film, optical coating and biological applications.
This spectroscopic phase modulated ellipsometer is extremely fast and by using a high speed photoelastic modulator driven at 50kHz and digital signal averaging, a data acquisition rate of up to 1kHz (average of 50 cycles) with excellent signal to noise ratio is possible. This instrument provides versatile ex-situ operation when used with a goniometer for automatic variable angle measurements, and may also be used for in-situ work where the instrument can monitor and control deposition / etch processes in real time. Models are available to cover the wavelength range 190 - 1700nm (6eV - 0.75eV) with excellent sensitivity across the full range.
