Equilibrion family is specifically designed for the monitoring of pulsed, bi-polar and steady-state ionisation bars for semiconductor, flat panel manufacturing, medical, and military/defense
The new Equilibrion CTC039 is said to be the only ioniser monitor in the industry today with patented on-board technology scaled to accurately read the wider peak-to-peak pulse swings associated with pulsed or bi-polar ionisation, and also provides balance and decay-time indications automatically and continuously.
Equilibrion can interface with a facility monitoring system to provide data on all ionisation parameters for continuous monitoring.
If a tool is certified per the Semi E-78, ESD standard, Equilibrion plays an important role in monitoring the established ionisation parameters to maintain the exit charge criteria and therefore the tool's certification.
A remote display (optional) connected to Equilibrion provides a quick easy-to-read remote status of how well the ioniser is performing while inside an operating tool or a mini-environment.
These settings include peak pos/neg voltage, balance and decay times.
For added convenience, the sensor settings can be set or changed remotely via the remote display.
Many tools come equipped with ionisation inside.
Until now the end user has no way of knowing if the ioniser is on, or operating within specifications.
To know for sure the engineer needs to stop the operation, and open up the tool (changing the environment) and check the ioniser.
Equilibrion's small and unobtrusive size easily integrates into the tool allowing automatic and continuous ionisation monitoring while the tool is in operation - under true environmental operating conditions, saving time and money.
An alarm condition (auditable and visual) will notify the engineer when the ionisation parameters exceed the sensors user-defined limits.
For convenience an Equilibrion monitor kit CTK059 has been assembled which includes CTC039 (monitor), CTA236 (display) and CTA218 (universal power supply).
