Lambda Physik's newest generation of LPX excimer lasers incorporates several engineering innovations that deliver improved performance, enhanced ease-of-use and reduced cost of ownership
Specifically, these high-duty-cycle lasers now deliver the industry's longest gas lifetimes, superior beam characteristics and purgeable external cavity optics.
The gas fill lifetime is now tens of millions of pulses, even at 193nm with argon fluoride.
These improvements are a direct result of four engineering advances.
First, the LPX laser tube includes a novel gas purification system that utilizes particularly effective filtering of the laser gas during periods of operation.
Also, by incorporating proprietary smooth ceramic preionisation technology, an effective and even preionization volume is created.
This yields stable and homogeneous laser output over the LPX dynamic energy range and offers pulse energies up to 1200mJ.
Of particular advantage for efficient industrial use is the newly developed external resonator design.
The external laser optics are completely decoupled from the laser tube and are mounted in purgeable housings, enabling unrivaled beam directional stability in conjunction with the longest operating lifetimes.
Facilitating compliance with industrial environment regulations, the halogen filter of the new LPX is located inside the laser housing.
The LPX family of lasers are cost-efficient, industrial-grade excimer lasers supporting high duty-cycle use.
Pulse repetition rates up to 200Hz and pulse energies as high as 1200mJ are available.
The LPX is ideal for demanding industrial applications, such as precision micromachining, ink-jet nozzle drilling, pulsed laser deposition, and testing of optical materials.
Plus, LPX lasers are excellent sources for pumping the ScanMate tunable dye laser.
