The oscillation of both the 1D and 2D micro scanning mirror and the translational micro mirror, will be shown under stroboscopical light at the Fraunhofer IPMS booth at Micromachining/Mems 2008, Tokyo
Fraunhofer IPMS carries out customer specific developments in fields of microelectronic and micro systems technology in Dresden, serving as a business partner that supports the transition of innovative ideas into new products.
Fraunhofer IPMS develops and fabricates modern Cmos technology products in its own clean room facilities, up to small pilot series production.
With modern equipment and about 150 scientists, the range of projects and expertise covers sensor and actuator systems, microscanner, spatial light modulators, lifetronics and organic materials and systems.
At the Micromachining/Mems show the Fraunhofer IPMS presents:.
1D and 2D Micro Scanning Mirrors.
The resonantly driven Micro Scanning Mirror is designed for periodical deflection of light.
The actuator chip is fabricated with a Cmos compatible micromachining technology.
A circular respectively elliptic silicon plate serves as mirror plate and is suspended by two torsional springs.
In the case of the 2D Scanner a gimbal mounting of the mirror plate is used.
The oscillation of the plate is excited electrostatically.
As all the mechanical parts are made of single crystal silicon the devices show a very high robustness and long-term stability.
A demonstrator with a large optical scan range of 120deg optically will be shown at the booth.
Translational micro mirror for optical path length modulation.
Optical metrology systems like Fourier transform spectrometers or confocal microscopes require fast modulation of the optical path length to shorten measurement times.
Conventional solutions with complex driving mechanics for the deflectable mirrors show high sensitivity against vibrations and shock.
As a result they often are suitable for laboratory operation, only.
Application of translational mirrors for optical path length modulation allows to overcome this disadvantage.
In addition to high vibration and shock insensitivity, the advantage of high frequency operation and potential low fabrication cost for medium and high volumes enables the development of robust, fast and highly miniaturized metrology systems for industrial applications.
Fabrication of the translational mirrors is done with a Cmos compatible Mems-SOI technology.
High reflectivity (app 95%) in the near and mid infrared range is achieved by an aluminisation.
The translational micro mirrors are optimised for medium and high frequency optical path length modulation.
Typical applications are Fourier-Transform (FT-IR) spectrometry, confocal microscopy, and focal point variation.
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"The tiny dimensions of the mirrors enable totally new application fields as the integration of mirror based laser projection modules into mobile phones, miniaturised spectrometer or scanning photon microscopes", explaines Harald Schenk, Fraunhofer IPMS's deputy director.
