Coherent has added the fully Semi S2-certified Indystar 2kHz laser to its Indystar range of compact excimer lasers.
The Indystar 2kHz laser incorporates several new output stabilisation features for improved processing, making them ideal for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities.
It is offered with a choice of 193nm (ArF) output where it delivers 8W of stabilised power, or 248nm (KrF) output with 12W of stabilised power.
The Indystar uses an advanced electronics platform enabling two new stabilisation features called Powerlok and Timelok.
The Powerlok feature ensures constant pulse energy of each single laser pulse, actively stabilised particularly for applications using bursts of pulses or specific pulse trains.
Timelok is said to provide trigger-to-pulse delay stability, supporting tight synchronisation with other equipment.
Coherent said the Indystar lasers offer low cost of ownership, in large part because of their use of All-Metal-Ceramic (Almeta) tube technology, which is claimed to deliver high reliability and long lifetime.
With 193nm operation, the Indystar 2kHz shows a tube/optics lifetime exceeding 10 billion laser pulses, which translates into hands-free operation of more than one year.
It is said to deliver faster and better results for semiconductor applications such as photomask inspection and testing photolithography optics.
It also enables other high-speed processes including precision material ablation tasks and high-value marking applications.
