Newport has introduced the Laser uFAB, a tabletop laser microfabrication workstation optimised for research applications.
The Laser uFAB is designed for use in additive and subtractive processes, including 3D microfabrication by two-photon polymerisation (TPP), laser ablation and surface structuring of various materials, volumetric writing of waveguides and microfluidics, nanosurgery and microdissection.
Specific research applications using TPP in custom or commercial photoresists include photonics, microelectronics and MEMS.
Relevant industrial materials that can be used in ablation and surface-structuring applications include metals, polymers, semiconductors, glasses, ceramics and biological targets.
Waveguides and microfluidics can be volumetrically written in glasses and polymers.
Nanosurgery and microdissection can be done in vivo for sub-cellular investigations of model organisms.
The Laser uFAB can be configured for use with femtosecond laser oscillators, amplifiers, OPAs and other types of lasers in the visible to near-infrared (VIS-NIR) range.
Sub-micron spot sizes are achieved at the sample with high numerical aperture objectives.
Simple lenses can be used in less critical applications, for example, where 10-20um spot sizes are acceptable.
Computer-controlled variable attenuation is integrated with the workstation to prevent over or under exposure at the sample.
The standard Laser uFAB includes high precision stages covering 100mm X and Y, and 4.8mm Z, with a resolution of 50nm.
This allows for continuous large-area patterning without the need for stitching.
The top plate includes a holder with features for slides, cover slips, wafers or large samples.
Newport's new microfabrication workstation is an economical, tabletop solution designed for a variety of materials-research fields.
It combines the flexibility and accessibility of a typical research-grade experimental setup with the stability, reliability and ease of operation of a fully developed industrial instrument.
