The new IS40 ion source range from Henniker Scientific addresses both surface preparation and surface analysis applications under UHV conditions.
The IS40E is a differentially pumped scanning ion gun with two lens extractor type source for depth profiling in SIMS and XPS applications.
The two lens system allows easy and continuous variation of micrometer spot size over the primary energy range of 0.15 keV to 5 keV and with beam current density of up to 4 mA/cm2.
The slim profile and specially designed nose-cone angle of 50deg ensure best fit even in crowded chamber environments.
The filament is non-line-of-sight to the sample, thereby minimising contamination from the source.
It is field replaceable with non-critical alignment and long lifetime, making replacement both quick and economical compared with other designs.
The IS40C is a compact, easy-to-use extractor type ion flood source for sample surface cleaning.
The ion flood source generates a current of 15-25uA/cm2 (argon) with Gaussian beam profile.
The mounting length of the ion flood gun is adaptable to individual requirements.
Both sources are controlled via web browser or from a single Windows software package but can also be supplied as .dll modules for integration with existing control platforms.