The TMC13 Deposition Rate Controller has been designed to control film thickness in vacuum based deposition processes.
The touch-screen interface can be adjusted to suit a particular operator preference and can be operated in both automatic and manual modes.
The device provides a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent deposition sources.
It also includes shutter relays for each channel, two analogue inputs for connection of pressure gauges, and two re-transmission analogue outputs as standard, as well as a materials library.
Where control features are not required, the quartz crystal balance can be interfaced directly with a PC via the compact, low cost, single channel TM13 interface which provides a frequency to rate/thickness conversion for all industry standard 6MHz quartz crystals.
