A collaboration has resulted in a prototype nanopositioning system based on the principle of magnetic levitation.
Physik Instrumente, the Institut für Mikroelektronik- und Mechatronik-Systeme and the Department of Mechatronics of Ilmenau University of Technology have worked together to come up with the system in which the platform levitates on a magnetic field.
The field is generated by six coils and is actively monitored via a 6-D sensor. The magnetic field functions as drive and actively guides the platform.
The drive and the compact high-resolution measurement system for the six degrees of freedom was developed so that the platform remains passive - and no cable connections are necessary.
A two-dimensional, optically incremental measurement system records the position with capacitive sensors and serves to control the drive in all axes. In this way, objects can be moved linearly or rotationally on a plane with a previously unattained guiding accuracy.
The prototype currently has a motion range of 100 x 100 x 0.15 mm³. Trajectory motions can be carried out at an acceleration of up to 2 m/s2 and a velocity currently of up to 100 mm/s with nanometer precision.
The digital motion controller, based on a modular system from PI, can process different geometry files as well as coordinate transformations and offers an optimum basis for a successful new product line.
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