The MCS XY stage from PI miCos for industrial measurement technology combines high guiding and positioning accuracy.
Coping with loads of up to 20 kg, its areas of applications include industrial surface measurement technologies such as topology measurements on workpieces and optics or structural measurements on semiconductor wafers. Further axes can also be mounted on the platform, such as vertical, rotary or tilting stages.
The MCS system achieves its performance characteristics through selective combination of mechanical and electronic precision components.
With an optionally available linear encoder based on an interferometric displacement measuring system, the MCS achieves a resolution of 5 nanometers at a repeatability of 0.2 µm and a positioning accuracy of 3 µm over the entire travel range of 102 mm per axis. Its low straightness and flatness deviations in the XY motion plane of less than 2 µm confirm the high precision of the system.
The MSC can be driven by DC motors, stepper motors or magnetic linear motors. In the system equipped with the SMC Hydra Motion Controller from PI miCos, the XY stage achieves velocities of up to 200 mm/s and is also capable of moving con-stantly at a velocity below 1 µm/s.
