The stability of the laser chamber results in the longest static and dynamic gas lifetimes of any excimer laser, up to ten times longer than traditional designs
Pro-Lite Technology, a specialist photonics distributor, has announced the launch of the new EX5/500 excimer laser from Gam. This is the latest addition to Gam's range of compact ultraviolet lasers and features an innovative, all-metal/ceramic plasma tube that results in a gas fill that lasts up to ten times longer than traditional lasers and the highest performance for its size and class, up to 7.5W at up to 500Hz.
Central to the EX5/500's advanced performance is Gam's new generation plasma tube that is constructed entirely from chemically-inert metal and ceramic materials.
The stability of the laser chamber results in the longest static and dynamic gas lifetimes of any excimer laser, up to ten times longer than traditional designs (based on using a xenon chloride gas fill) and extended cavity optics lifetime.
As a result, the through-life cost of ownership of the EX5/500 is claimed to be the lowest of any comparable excimer laser available today.
The chamber design also leads to enhanced pulse to pulse energy stability.
Traditionally, excimer lasers have been regarded as bulky, complicated and costly-to-run devices.
The EX5/500 is set to dispel that reputation with a combination of compact dimensions (46x26x25cm), low weight (15kg) and air-cooled operation.
A broadband cavity optics set is fitted which supports laser operation at full specification from 157nm to 351nm simply by changing the gas fill.
Gas filling itself is a simple, automated procedure which takes no more than a couple of minutes and is controlled from a host PC using the supplied Windows application software.
The laser design also features an internal Faraday cage for ultra-low electrical noise.
Ian Stansfield, a partner in Pro-Lite commented: "The advances in compact excimer technology that Gam has introduced in the EX5/500 will lead to a significantly reduced machine downtime and much reduced through-life cost of ownership.
"I expect this will drive excimer technology into many new applications in both science and industry".
Excimer lasers offer intense UV and VUV pulsed outputs at 157nm, 193nm, 248nm, 308nm and 351nm.
The EX5/500 joins Gam's existing range of mini excimer lasers that are used in industrial precision machining of semiconductor and other materials, and in advanced photochemical research applications.
