FEI's Magellan high-resolution scanning electron microscope (XHR SEM) displays 3D surface images at various angles and at resolutions below one nanometer (the size of a row of 10 hydrogen atoms).
The Magellan XHR SEM images samples at low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below.
FEI will showcase the Magellan XHR SEM at Pittcon 2009.