John Morris Scientific has announced a dual-range manometer from MKS Instruments that offers absolute pressure sensor compatibility with the reactive gases used in semiconductor manufacturing.
Dual outputs provide accurate, reliable and repeatable pressure measurement and are used for multi-step processes such as CVD, etch and resist strip.
MKS manometers cover the pressure range from 1 to 1,000 Torr and the temperature can be controlled to 1,000C.
It provides a customer specified second output, which is two, five or 10x lower than the basic full scale range.
Accuracy is 0.25 per cent or reading 0.12 per cent for 45C controlled units, providing greater resolution over the lower range of the instrument.
The sensors have an integrated sump for particle protection.
The dual-range manometer comes in four versions.
Relay status is indicated by dual colour LEDs, and relay set points can be used for valve operation, safety interlocks, or pump crossover control.
