Physik Instrumente's P-563.3CD PIMars stage is a piezo flexure-guided scanning / nano-manipulation system.
The unit enables precise motion control with resolution in the sub-nanometre realm and 340 x 340 x 340um travel in XYZ.
Integrated direct-measuring capacitance sensors and digital closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.
Typical applications include: micro manufacturing, bio-technology, nanotechnology, scanning microscopy, nano-manipulation, nano-imprint, semiconductor and data-storage test equipment.
PIMars stages incorporate high-force solid-state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors.
The high force of the solid-state piezo actuators allows for fast response in the millisecond range and high scanning frequencies.
PIMars stages are based on a different design principle than conventional scanning stages.
The XYZ system consists of only one moving part, a single module rather than three individual stacked modules as common in other XYZ systems.
This parallel-kinematics mechanical design is complemented by a parallel direct-motion metrology feedback system.
With parallel direct-metrology, all non-contact sensors monitor the moving platform in reference to ground 'from the outside'.
They can monitor off-axis and run-out errors.
The controller then eliminates unwanted motion in real-time.
Conventional serial-metrology sensors (integrated in each axis) cannot detect off-axis errors.
Parallel-motion metrology allows for significantly higher overall XYZ precision.
Features include: 340 x 340 x 340um travel range; 66 x 66mm clear aperture; nanometre resolution; millisecond responsiveness; ultrahigh vacuum versions; Invar, Super-Invar and titanium versions; and a choice of analogue and digital controllers in bench-top, OEM-board and rack-mount designs.
