The Mprobe non-contact film-thickness measurement system from Lambda Photometrics uses spectroscopic analysis methods to measure the thickness of translucent multi-layer film stacks.
The unit is able to measure film stacks in a thickness range of 1nm to 1mm, depending on the system.
It can also measure refractive index and surface roughness.
A series of Mprobe systems is available from the ultraviolet (UV) to the infrared (IR) for a range of thickness and resolution requirements.
The TFCompanion control and analysis software package allows users to build layer-stack models from a library of materials, as well as adding customised materials.
Standalone versions of the TFCompanion software are also available for end users and system integrators.
MProbe is suitable for at-line, online and OEM scenarios, as well as academic and industrial research and development.
Typical applications include solar-cell PV coatings, polymer films, semiconductors, photoresists, thin oxide and nitride films, LCD and flat-panel displays and optical coatings.