Jeol USA will demonstrate a new high throughput thermal field emission (FEG) scanning electron microscope (SEM), the JSM-7600F, at M+M 2008 in Albuquerque, New Mexico, USA
Featuring the highest beam current available on any FEG SEM, the JSM-7600F integrates a semi-in-lens objective lens with an in-lens thermal electron gun, providing superior imaging of nonconductive samples that traditionally charge, such as photomasks, ceramics, and glass.
This new SEM minimises beam damage on heat sensitive samples such as low-K dielectrics, and offers improved stability for long-term, unattended data acquisition (metrology, particle analysis, defect review, EBSD, and X-ray mapping).
A new graphical user interface enables easy navigation through imaging and analysing procedures.
Jeol's proven in-lens thermal electron gun, combined with a patented aperture angle optimising lens, achieves a probe current of 200nA or higher at an accelerating voltage of 15kV, efficiently acquiring high quality data in elemental analysis.
The JSM-7600F is capable of high resolution high sensitivity analysis under any combination of operating conditions for various samples and research requirements, with guaranteed resolution at high accelerating voltage of 1.0nm (30kV; WD 4.5mm), guaranteed resolution at low accelerating voltage of 1.5nm (1kV; WD 1.5mm), and guaranteed resolution at high probe current of 3.0nm (probe current 5nA, accelerating voltage 15kV, WD 8mm).
The JSM-7600F is a powerful tool combining high resolution imaging and high speed analysis.
Utilising the electron beam finely focused at low accelerating voltage and high probe current, the microscope, when outfitted with an EDS detector, can rapidly acquire high resolution X-ray mapping data.
The JSM-7600F incorporates a through-the-lens detection system that features a new energy filter, R-filter, designed to vary the mixture rate of secondary electron and backscattered electron images, enhancing the topography or compositional differences of images as needed.
The user interface is designed to collectively define, save, and retrieve photographing and imaging conditions to facilitate data acquisition under optimum conditions.
It also supports simultaneous acquisition of four different types of images, significantly improving throughput.
The standard five-axis motor drive eucentric stage controls sample movement seamlessly throughout the magnification range from 25x to 1,000,000x.
Intuitive specimen control by the track ball assures smooth movement of the area of view in high magnification imaging.
The JSM-7600 specimen chamber accommodates samples up to 200mm in diameter, and features a complete set of detector ports secondary electron detector, backscattered electron detector, EDS, WDS, EBSD, and cathode luminescence detector, allowing the user to select an arrangement optimum to their analytical objectives.
