Henniker Scientific has released the Prevac Clam II thin-film deposition system for research and development and prototyping applications.
The system features the motorised Clam opening, providing full, unobstructed access to the targets, substrates and ancillary devices.
The system is of UHV construction with a differentially pumped Clam seal achieving base pressures <1E-9mbar.
It features seven UHV sputter-up 2in circular targets (RF/DC/Pulsed DC) that can operate at the focal point or vertically upwards.
The system also features a shutter with in-vacuum stepper motor for step layer deposition and a two-axis motorised manipulator with two 1in sample receiving stations: one positioned at the focal point and one over the vertical position.
The system is complemented by a range of add-on equipment including four-position introduction chamber with halogen lamp, in-situ ion source for sample cleaning, deposition rate quartz balance, CCD camera and residual gas analyser.
The entire system is PC controlled with dedicated Mimic screens and deposition process editor.
