Newport has introduced a confocal height sensor - a measuring tool that is ideal for radio-frequency and microwave packages that are difficult to measure using reflective-laser height-sensing methods.
The chromatic confocal sensor, which is designed for use with the company's MRSI dispense systems, enables measurements in a single axis, providing access to deep cavities, confined spaces and areas that are in close proximity to walls and other obstructions.
An LED light source with a sensor spot size of 50 microns in diameter is utilised to provide nano-resolution that is almost target independent.
The confocal sensor enables the accurate measurement of glass, semiconductor materials and mirrored surfaces, according to Newport.
It can be used to precisely determine dispense heights for three of the company's legacy products: the MRSI-175Ag, the MRSI-605 and the MRSI M-5.
The MRSI dispense systems provide advanced assembly solutions for complete epoxy die attach, eutectic and flip chip bonding, delivering turnkey production for MEMS, multi-chip modules, semiconductor packaging, microwave modules, flip chip applications and photonics packaging.
