With analysis of wafers up to 300mm, and an automatic wafer loader, this system makes X-ray analysis a tool for advanced materials research and also for process developmen
Panalytical introduces the Xpert Pro MRD XL, which it says is a breakthrough system that meets all the high-resolution XRD analysis requirements of the semiconductors, thin films, and advanced materials industries.
With analysis of wafers up to 300mm in diameter, and a sophisticated, automatic wafer loader option, the Xpert Pro MRD XL makes it possible for X-ray analysis to become an advanced tool not just for advanced materials research, but also for process development.
The Xpert Pro MRD XL is an enlarged version of Panalytical's proven Xpert Pro MRD system, which the company claims has the world's largest installed base of high-resolution diffraction equipment.
By facilitating X-ray analysis during the process development stage, the Xpert Pro MRD XL represents the logical next step in advanced materials analysis.
It achieves this with two unique product advantages: complete mapping of wafers up to 200mm and significantly enhanced mapping of wafers up to 300mm, and a sophisticated, automatic wafer loader option that enables the Xpert Pro MRD XL to function as an 'in-wall' system, with the wafer being loaded from a clean room environment and placed on to a self-centred wafer holder.
The Xpert Pro MRD XL is equipped with Prefix, Panalytical's proprietary system for the fast and flexible exchange of diffractometers - including optical modules indispensable for advanced materials research such as the X-ray mirror, the hybrid monochromator, the X-ray lens, and the mono-capillary.
Prefix eliminates the need for time-consuming realignment when switching from one kind of analysis to another, giving the Xpert Pro MRD XL an almost unlimited capacity to adapt to changing circumstances.
The Xpert Pro MRD XL also features the Xcelerator, Panalytical's breakthrough diffraction solution that has delivered a 100-fold increase in measurement times.
The Xpert Pro MRD XL system is controlled by the Xpert Data Collector, a part of PANalytical's advanced and modular Xpert software range, which is designed specifically for data acquisition and analysis based on the XML format.
The Xpert Data Collector provides the users of the Xpert Pro MRD XL with a powerful central control module for all their XRD measuring routines.
The Xpert Pro MRD XL meets the need for all application techniques including: thin film studies, wafer mapping and stress and texture analysis.
This makes the Xpert Pro MRD XL extremely effective in application areas such as: compound and silicon based semiconductors, nano materials, and oversized and heavy samples.
