Typical applications: bio-technology, metrology, micromachining, medical technology, micromanipulation, photonics packaging
PI (Physik Instrumente) offers one of the smallest motorised stages in the world delivering 50nm incremental motion.
The M-110 series translation stages provide linear motion of 5, 15 and 25mm.
They deliver 50nm minimum incremental motion and can be equipped with high-speed piezo drives for scanning or positioning with 1nm resolution.
X, XY and XYZ systems are available, and can be combined with the M-116 rotary stage.
Typical applications: bio-technology, metrology, micromachining, medical technology, micromanipulation, photonics packaging.
Features and advantages: folded drives provide smaller footprint, 50nm minimum incremental motion (7nm motor design resolution), 5, 15 and 25 mm linear travel ranges, 360 deg rotary range, lead screw drives (lower cost) and ball screw drives (continuous operation), closed-loop DC motors (higher precision) and stepper motors (lower cost), integrated Hall-effect limit and reference switches, piezo option for fast scanning/positioning with 1nm resolution, choice of motors and drives lead screws (higher resolution) and ball screws (higher speed/longer lifetime) are offered, driven by stepper motors (lower cost) and closed-loop servo motors (higher precision).
The encoder on the DC servo motor version features 0.007um resolution per count.
Hybrid option with high-speed piezo scanner.
For applications requiring extremely high resolution or very fast scanning, a closed-loop piezo scanner can be mounted on the stages.
It provides 1nm resolution and response times of a few milliseconds.
One to four axis systems: M-110, M-111 and M-112 can be combined to form XY, XZ and XYZ systems for multiaxis positioning and alignment applications; a rotation stage is also available.
Controllers.
A large variety of PC-plug-in and stand-alone controllers are offered to suit all needs.
Software for alignment applications is also available.
