PI (Physik Instrumente) offers one of the smallest motorized stage families in the world, capable of delivering 50 nanometer incremental motion
The M-110 series translation stages provide linear motion of 5, 15 and 25mm.
X, XY and XYZ systems are available, and can be combined with the M-116 miniature rotary stage.
The systems can also be equipped with high-speed piezo drives for scanning or positioning with nanometer precision.
Typical applications: biotechnology, metrology, micromachining, medical technology, micromanipulation, photonics packaging.
Features and advantages.
Folded drives provide footprint as small as 62x60mm.
50nm true minimum incremental motion (7nm motor/encoder resolution).
5, 15 and 25mm linear travel ranges, 360 deg.
Rotary range.
Choice of lead screw drives (lower cost) and ball screw drives (higher speed/continuous operation).
Choice of closed-loop DC motors (higher precision) and stepper motors (lower cost).
Integrated Hall-effect limit and reference switches.
Piezo option for fast scanning/positioning with 1 nm resolution.
Choice of motors and drives.
Lead screws (higher resolution) and ball screws (higher speed / longer lifetime) are offered, driven by stepper motors (lower cost) and closed-loop servo motors (higher precision).
The encoder on the DC servo motor version features 0.007um resolution per count.
Hybrid option with high-speed piezo scanner.
For applications requiring extremely high resolution or very fast scanning, a closed-loop piezo scanner can be mounted on the stages.
It provides 1nm resolution and response times of a few milliseconds.
Controllers.
A large variety of PC-plug-in and stand-alone controllers are offered to suit all needs.
Software for alignment applications is also available.
