PI (Physik Instrumente) introduces the world's first fully-integrated hybrid Z-nanopositioning system employing piezoelectric and DC-motor drives.
The M-714 precision Z-stage/C-702 Hybrid Controller combine the well-known piezo drive advantages of unlimited resolution and very fast response with the long travel ranges and high holding forces of a servo-motor/ballscrew arrangement.
Typical applications: surface inspection, microscopy, laser technology, interferometry, metrology.
Features and advantages.
Two nanometer linear encoder resolution.
Active compensation of stick/slip during startup and settling.
Active backlash compensation.
Excellent velocity control.
Millisecond settling to nanometer accuracy.
Reliable execution of nanometer level increments.
7mm vertical travel range.
High holding forces with minimum power consumption.
10kg vertical load capacity.
No counterbalance mechanism required.
Hybrid controller technology is key to success.
The highly specialized C-702 hybrid controller reads the stage position from an integrated, 2 nm precison linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance.
Due to their instantaneous, sub-millisecond response, the integrated piezo actuators provide active stick/slip compensation during startup and settling.
They also improve velocity control and positioning performance when nanometer level steps need to be executed.
Novel high-bandwidth encoder interface, realtime operating system.
The C-702 hybrid controller is equipped with a novel high-speed encoder interface and can handle encoder count rates of 100 million pulses per second.
Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user.
Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).
A 100mm hybrid translation stage is also available.
