Compact, ultra-high resolution, motorised translation stages can be combined to form XY, XZ and XYZ systems for multiaxis positioning and alignment applications
M-110, M-111 and M-112 micropositioning systems from PI are described as very compact, ultra-high resolution, motorised translation stages providing linear motion of 5, 15 and 25mm.
They deliver 50nm minimum incremental motion and can be equipped with piezo drives for fast scanning and even higher resolution (1nm).
X, XY and XYZ systems are available.
Typical applications: metrology, micromachining, medical technology, micromanipulation, bio-technology, photonics packaging automation, quality control, test equipment.
Choice of motors and drives.
The stages were designed to provide a cost effective solution for research and industrial applications.
Lead screws and ball screws (for continuous operation) are offered, driven by stepper motors (lower cost) and closed-loop servo motors (higher precision).
The encoder on the DC servo motor version features 0.007um resolution per count.
Non-contact limit and reference switches.
Non-contacting precision Hall-effect homing sensors are installed to facilitate automation processes.
Limit switches protect the mechanics from damage.
Hybrid option with high-speed piezo scanner.
For applications requiring extremely high resolution or very fast scanning, a closed-loop piezo scanner can be mounted on the stages.
It provides 1nm resolution and response times of a few milliseconds.
M-110, M-111 and M-112 can be combined to form XY, XZ and XYZ systems for multiaxis positioning and alignment applications.
A large variety of PC-plug-in and stand-alone controllers are offered to suit all needs.
Software for alignment applications is also available.
